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- Contact Person : Ms. huang lotus
- Company Name : Chengdu Corder Optics & Electronics Co., Ltd.
- Tel : 86-28-85100375
- Fax : 86-28-85100621
- Address : Sichuan,Chengdu,Optics and Electronics Industrial Park, No.187 Great Wall Road, The Southwest Airport economic development zone
- Country/Region : China
- Zip : 610207
lithography machine for URE-2000A
Product Detailed
Related Categories:Other Optics Instruments
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Exposure Area: 110mm×110mm (or 150mm×150mm)
Resolution: 1µm
Parietal Gradient: 85°( Photoresist Thickness: 600µm )
Illuminating Uniformity: ±3%
Most Photoresist Thickness: 1mm
Alignment precision: ±0.5µm ( CCD Alignment )
Depth to Width: >20:1
Hg-Lamp Power: 1000W
Exposure Model: Timing or Dosing
Other products
